在室温和400～700℃条件下,采用 1×1017ions/cm2注入剂量和200keV加速电压对 Ti6Al4V合金进行了氦离子注入.分别采用纳米硬度仪和X射线衍射方法对Ti6Al4V合金的氦离子注入表面层(≤700nm)进行了纳米硬度、弹性模量测试和物相分析.结果表明:在室温至600℃范围内,氦离子注入温度越高,Ti6Al4V合金注入层的硬度也越高,而其弹性模量则变小.氦离子注入温度为700℃时,Ti6Al4V合金发生了软化,其弹性模量也有所提高.氦离子注入引起的硬化现象与点缺陷和Ti6Al4V合金中β相的析出有关,而软化现象则与β相的粗化和γ-TiH相的形成有关.
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