采用直流对靶磁控溅射方法制备氧化钒薄膜,通过改变热处理温度获得了具有不同晶粒尺寸的相变特性氧化钒薄膜,对氧化钒薄膜相变过程中电阻和红外光透射率随温度的突变性能进行研究.结果表明:经300℃和360℃热处理后,薄膜内二氧化钒原子分数达到40%,氧化钒薄膜具有绝缘体-金属相变特性,薄膜的晶粒尺寸分别为50nm和100nm;经360℃热处理后,氧化钒薄膜表面变得致密,晶粒之间出现了联并;电学和光学相变特性的表征结果表明,电学与光学相变温度随晶粒尺寸的增加而减小;电学相变持续的温度宽度为30℃,而光学相变持续的温度宽度仅为8℃,相变持续的温度宽度保持不变.
参考文献
| [1] | MORIN F J .Oxides which show a metal-to-insulator transition at the neel temperature[J].Physical Review Letters,1959,3(01):34-36. |
| [2] | Lysenko S;Rua AJ;Vikhnin V;Jimenez J;Fernandez F;Liu H .Light-induced ultrafast phase transitions in VO2 thin film[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2006(15):5512-5515. |
| [3] | LEE J S;ORTOLANI M;SCHADE U et al.Micro spectroscopic detection of local conductor areas generated by electricpulse-induced phase transition in VO2 films[J].Applied Physics Letters,2007,91(13):133509. |
| [4] | 李金华,袁宁一,谢太斌,但迪迪.超高温度系数V0.97W0.03O2多晶薄膜的制备研究[J].物理学报,2007(03):1790-1795. |
| [5] | QAZILBASH M M;BREHM M;CHAE B G et al.Mott transition in VO2 revealed by infrared spectroscopy and nano-imaging[J].Science,2007,318(14):1750-1753. |
| [6] | Wang HC;Yi XJ;Lai JJ;Li Y .Fabrication and characterization of nanocrystalline VO2 thin films[J].Chinese physics letters,2005(7):1746-1748. |
| [7] | Sidorov AI;Vinogradova OP;Khrushcheva TA;Obyknovennaya IE;Ermolaeva GN;Shilov VB .Optical properties of vanadium dioxide nanoparticles in nanoporous glasses[J].Journal of optical technology,2008(1):33-37. |
| [8] | 梁继然,胡明,阚强,王晓东,李贵柯,李昌青,陈弘达.纳米VO2薄膜相变特性的红外透射表征研究[J].光电子·激光,2010(03):323-327. |
| [9] | Alov N;Kutsko D;Spirovova I;Bastl Z .XPS study of vanadium surface oxidation by oxygen ion bombardment[J].Surface Science: A Journal Devoted to the Physics and Chemistry of Interfaces,2006(8):1628-1631. |
| [10] | Sahana MB.;Subbanna GN.;Shivashankar SA. .Phase transformation and semiconductor-metal transition in thin films of VO2 deposited by low-pressure metalorganic chemical vapor deposition[J].Journal of Applied Physics,2002(11):6495-6504. |
| [11] | Brassard, D;Fourmaux, S;Jean-Jacques, M;Kieffer, JC;El Khakani, MA .Grain size effect on the semiconductor-metal phase transition characteristics of magnetron-sputtered VO2 thin films[J].Applied Physics Letters,2005(5):1910-1-1910-3-0. |
| [12] | ROZEN J;LOPEZ R;HAGLUND R F et al.Two-dimensional current percolation in nano-crystalline vanadium dioxides films[J].Applied Physics Letters,2006,88(08):081902. |
| [13] | 梁继然,胡明,王晓东,李贵柯,季安,杨富华,刘剑,吴南健,陈弘达.纳米二氧化钒薄膜的制备及红外光学性能[J].物理化学学报,2009(08):1523-1529. |
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