设计了过渡层和梯度膜结构,采用PVD磁控溅射工艺和PVD磁控溅射+PECVD(脉冲等离子增强化学气相沉积)复合工艺在高速工具钢W6Mo5Cr4V2表面制备不同的类金刚石(Diamond-like Carbon,DLC)膜:Ti过渡层+DLC膜以及CrN+CrNC+CrC+DLC(掺杂Cr)硬质膜.对这两种膜层的成分、结构、形貌和力学性能的对比分析发现,前者表面粗糙度小,但是后者的综合力学性能更好.
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