主要采用常规X射线衍射法(XRD)和小角X射线衍射法对微米级厚度的Ti0.5Al0.5N涂层分别进行了物相检测、晶格常数计算和残余应力测定,并对测量结果进行了比较.结果表明:常规XRD法得到的图谱中基体信息强,而小角XRD法排除了基体衍射峰的干扰,更好地反映出TiAlN涂层信息；与常规XRD相比,小角XRD技术能显著降低晶格常数测量误差,有效测定TiAlN涂层的残余应力值.
参考文献
| [1] | 唐伟忠.薄膜材料制备原理技术及应用[M].北京:冶金工业出版社,1998:189-230. |
| [2] | Oettel H;Bertram T;Weihnacht V;Wiedemann R;Zitzewitz SV .Mechanical behaviour of TiN coatings[J].Surface & Coatings Technology,1997(1/3):785-789. |
| [3] | 田志宏,张秀华,田志广.X射线衍射技术在材料分析中的应用[J].工程与试验,2009(03):40-42. |
| [4] | 高鸿奕,谢红兰,陈建文,徐至展.X射线的穿透深度[J].激光与光电子学进展,2001(11):27-30. |
| [5] | Barshilia H C;Prakash M S;Jain A et al.Structure,hardness and thermal stability of TiAIN and nanolayered TiAlN/CrN multilayer films[J].Vacuum,2005,77:169. |
| [6] | Huang J H;Tasi Y P;Yu G P .Effect of processing parameters on the microstructure and mechanical properties of TiN film on stainless steel by HCD ion plating[J].Thin Solid Films,1999,355-356:440. |
| [7] | Brennan S.;Leung OS.;Nix WD.;Munkholm A. .X-ray measurements of the depth dependence of stress in gold films[J].Physica, B. Condensed Matter,2000(1/3):125-129. |
| [8] | Kang MC.;Park IW.;Kim KH. .Performance evaluation of AIP-TiAlN coated tool for high speed machining[J].Surface & Coatings Technology,2003(0):734-738. |
| [9] | Wang Y K;Xiao L F;Lei T O et al.A research on microstructure and properties of (Ti,Al) N coating[J].Surface and Coatings Technology,1995,72:71. |
| [10] | Prengel HG.;Santhanam AT.;Pfouts WR. .State of the art in hard coatings for carbide cutting tools[J].Surface & Coatings Technology,1998(3):183-190. |
| [11] | Castanho J M;Vieira M T .Effect of ductile layers in mechanical behavior of TiAIN thin coatings[J].Journal of Materials Processing Technology,2003,143-144:352-357. |
| [12] | 杨于兴;胡赓祥 .薄膜X射线应力分析技术的研究[J].上海交通大学学报,1994,28(06):52-58. |
| [13] | 陈佳荣,朱丽慧,倪旺阳,刘一雄.Al含量对TiAlN涂层的组织和抗氧化性能的影响[J].上海金属,2010(03):11-14. |
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