采用化学气相沉积法制备了阵列碳纳米管薄膜,对薄膜生长厚度进行了系统研究.利用扫描电子显微镜(SEM)、拉曼光谱(Raman)对样品形貌以及结构进行了表征.结果发现,在相同的生长时间和一定的催化剂浓度范围内,阵列碳纳米管的薄膜厚度随催化剂浓度提高而增加；在生长时间相同时,阵列碳纳米管薄膜厚度随载气流速的增加而降低,且下降趋势近似为线性；随着生长时间的增长,阵列碳纳米管薄膜的厚度也随之增加,且在前60min生长速度最快达到24μm/min,60min之后生长速度减缓.
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