采用溶胶-凝胶法在 Si(100)衬底上生长了K与N共掺的ZnO 薄膜，并用 X射线衍射仪、扫描电子显微镜、荧光分光光度计、紫外-可见分光光度计对ZnO 薄膜样品的结构和光学特性进行了研究。结果表明，溶胶-凝胶法制备的 ZnO 薄膜为六方纤锌矿结构。随着K掺杂浓度的增大，薄膜的结晶性变好，组成薄膜的颗粒变大，并表现出c 轴择优生长特性，同时掺杂导致的氧空位缺陷也在增加，使得绿光发射增强，薄膜的光学带隙先增后减。
The K-N co-doped ZnO films were prepared on Si(100)substrates by sol-gel method.The structure and the optical properties of the ZnO films were investigated by X-ray diffraction,scanning electron microsco-py,photoluminescence and ultraviolet and visible spectrophotometer.The results show that the films exhibit a hexagonal structure.As the concentration of potassium increases,the crystallinity of the films was improved and the grain size increases,showing a preferential growth along c axis.Meanwhile,the increased concentration of K-N doping results in increased oxygen vacancies,enhanced green photoluminescence,and the optical band-gap that increases first and then decreases.
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