研究了基于高饱和磁感应强度的铁硅铝软磁材料的复合软磁材料薄膜的低温成型工艺和磁性能。绝缘包覆工艺上，使用高电阻率的锰锌铁氧体软磁粉末做绝缘剂。粘结工艺上，使用水玻璃做粘结剂，低温固化粘结。与传统工艺比，低温成型工艺与微加工工艺兼容。应用该工艺制作了软磁薄膜，采用超景深三维显微系统 VHX-2000观测复合材料的微观结构；运用振动样品磁强计测试薄膜的静态磁性能参数；使用交流磁化率测量仪测试薄膜动态磁性能参数。针对软磁磁粉颗粒度、绝缘包覆、粘结成型等不同工艺因素，制作了薄膜样品，总结了不同工艺因素对薄膜综合磁性能的影响。
This paper introduces the general magnetic properties and a new low temperature modeling process of a special compound soft magnetic film based on FeSiAl powder.In this experiment,the ZnMn ferrite soft mag-netic powder with high resistivity was insulator.Waterglass was used as binder for low temperature modeling. Compared with conventional process,low temperature modeling process was compatible with micro-nano fabri-cation.In the end,we use microscope system VHX-2000 to observe the micro structure of the compound mate-rial.The static magnetic parameters will be tested by using the module of PPMS (physical property measure-ment system)called VSM (vibrating sample magnetometer).The dynamic magnetic parameters will be tested by the ACMS (alternating current magnetization susceptibility)instrument.In the end,we make the final prac-tical sample with different technical elements.These elements include particle size of the powder,the content of insulator as well as the content of the binder.After test and analysis of the result data,we make conclusions on the relationship between the technical elements and its effect on the general magnetic properties.
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