成分的有效控制是多元涂层材料研究和应用中的重点和难点。在反应溅射沉积 Berg 模型基础上建立了多元镶嵌靶溅射沉积涂层的成分模拟方法，以Ti、Al 和石墨三元镶嵌靶为例，模拟了靶材石墨含量及N2分压对TiAlCN涂层中Ti/Al原子比、C含量和N含量的影响，并对引起成分变化的内在原因进行了探讨。
Precise content control was not easy for multiconponent coatings.This paper propose a mothed of con-tent simutation base on berg model for reactive sputtering deposition with multicomponent mosaic targets.Tak-ing Ti/Al/graphite mosaic target as example,the effect of graphite ratio in target and N2 partial pressure on Ti/Al ratio,C content and N content in TiAlCN coatings are simulated.The mechanism of component changing are also disscussed.
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