PVD法制备 Fe-6．5％Si(质量分数,下同)高硅钢过程基片预处理工艺以及 Si 渗入对合金的软磁性能均有显著影响。采用磁损耗分离的方法剖析铁硅合金磁性变化的内在机理。采用四探针方法测试合金的电阻率；采用基于热分析仪(DSC)配置永磁场技术测量热重(TG)曲线确定合金的居里温度；采用振动样品磁强计(VSM)测定了材料的饱和质量磁矩；采用直流测试装置和硅钢测试仪测试合金的直流交流软磁性能。PVD法制备6．5％Si高硅钢最大磁导率达到16400,相比于初始态3％低硅钢基片,铁损值降低40％~50％。
In the processes of preparing Fe-6 .5%Si alloy by means of PVD method,both pre-treatment tech-niques to the starting substrate and Si-enrichment have distinct effect on the soft magnetic properties.The total loss is subdivided into hysteresis,classical and excess components to clarify the changing mechanism of the soft magnetic properties under different conditions.Resistivity of the samples is measured by four-probe method. Curie temperature is characterized by thermo-gravity curve of differential scanning calorimeter (DSC)with ap-pendix of permanent magnet.Magnetic properties were evaluated by vibrating sample magnetometer (VSM), automatic DC B-H curve tracer and alternating current (AC)iron loss analyzer.Maximum permeability of PVD-prepared Fe-6.5% Si alloy reaches to 16 400,and its iron losses are declined about 40-50% comparing with the starting substrate.
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