采用离子化增强磁控溅射设备在硬质合金(YG8)基体表面沉积CrAlCN 涂层，通过控制碳靶电流的大小，从而改变涂层中的碳含量。沉积后的涂层进行了纳米硬度、扫描电镜、X射线衍射、电子能谱和洛氏硬度结合力检测。随着碳靶电流的升高，涂层中的碳含量呈线性上升，涂层由晶态逐渐转变为非晶态，当涂层中的碳含量达到某个临界值时，超过临界值的碳以脆性非晶态继续沉积在涂层表面，其硬度低，韧性差，导致涂层的结合力与硬度下降。
The CrAlCN coatings were deposited on the surface of cemented carbide(YG8)by a plasma-enhanced medium frequency reactive magnetron sputtering apparatus in this experiment,the carbon content of CrAlCN coatings was controlled through changing the current of carbon target.To characterize the films,nanoindenta-tion hardness test,scanning electron microscopy(SEM),X-ray diffraction(XRD),energy dispersive spectrosco-py(EDS),and rockwell indentation adhesion test were analyzed systematically.As a result,with the increase of the current of the carbon target,the carbon content in the coatings rises linearly,the crystal morphology of the coatings changed from columnar to non-crystal gradually,the adhesion and hardness of the coatings j ump down as carbon content reaches a criticality,the reason for that is redundant carbon continued to deposit on the sur-face of the coatings as brittle amorphous simple substance after it reaches the criticality.
参考文献
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