采用磁控溅射法在透明玻璃基底上制备50 nm厚的ZnO种子层,利用水热法在ZnO种子层上生长厚度大约为1 000 nm左右的ZnO:Cd纳米棒薄膜,通过SEM,XRD对其形态和晶体结构进行分析.结果表明:该薄膜是由沿C轴方向生长,呈六角纤锌矿结构的ZnO:Cd纳米棒阵列组成,并研究了薄膜型光学气敏传感器对氢气的光学敏感特性,结果表明:当工作温度为室温时,ZnO:Cd纳米棒薄膜器件对浓度为500×10-6的氢气表现出明显的光学敏感特性,且具有良好的可重复性.
Oriented ZnO:Cd nanorods thin films of about 1000nm thickness have been synthesized by sputtering and hydrothermal method on the transparent glass substrates.Their morphologies and crystal structures are characterized by scanning electron microscopy (SEM) and X-ray diffraction (XRD).The SEM results show that those films are composed of nanorods arrays and the XRD patterns of the samples indicate that those nanorods are the hexagonal phase of wurtzite with c-axis orientation.The sensors are fabricated by adhering a film to a transparent glass substrate to form a small cell.The optical transmittances of the sensors are measured before and after they are exposed to Hydrogen gas by spectrophotometer.The sensors show fast optical response to 500×10-6 H2 at room temperature with good repeatability.
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