许多年来,氮化钛镀膜的使用相当普遍.在周期表中与钛属于同一周期的另一过渡元素锆,亦是一引人注目的材料.已有许多关于氮化锆的研究,然而,对碳氮化锆的了解仍然有限.本研究使用非平衡磁控溅镀系统制备了ZrCN镀膜,探讨了C2H2/N2 反应气体流量比例、以及添加Ti、W等对ZrCN硬度和磨耗性能的影响.结果显示,在总反应气体流量固定不变状态下,ZrCN硬度及磨润性能随反应气体流量比例降低而增加;添加Ti和W会显著增加ZrCN的硬度和磨耗性能,添加Ti的效果比添加W的佳.不论有无添加物,ZrCN的磨耗性能皆明显比TiN的佳.
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