鉴于以醇盐为原料溶胶-凝胶制备La0.5Ca0.5MnO3薄膜工艺中存在诸多苛刻因素,本文以无机盐为原料采用溶胶-凝胶工艺在SiO2/Si(100)衬底上制备了La0.5Ca0.5MnO3薄膜.并用XRD、SEM和TEM等分析手段对薄膜进行了表征,通过不同磁场下电阻-温度(R-T)曲线,研究了样品的磁电阻(CMR)效应.结果表明:薄膜具有假立方钙钛矿晶体结构,表面良好晶粒平均约为30nm且随退火温度的升高而增大;四探针法测定0.6μm厚度的La0.5Ca0.5MnO3薄膜室温下的电阻率为0.0303Ω·cm;磁电阻在210K峰值达到14.5%.
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