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本文简要介绍了ZnO的晶体结构和其具有的光电性能,然后介绍了薄膜的几种制备方法,并分别阐述了这些方法的优、缺点,以及ZnO薄膜、掺杂ZnO薄膜的应用.

参考文献

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[2] Bragg W L;Darbyshire J A.Diffraction of electrons by metal crystals and by mica[J].Transactions of the Faraday Society,1932(28):522-526.
[3] Wu TT;Wang WS .An experimental study on the ZnO/sapphire layered surface acoustic wave device[J].Journal of Applied Physics,2004(9):5249-5253.
[4] Xu JQ.;Shun YA.;Tian ZZ.;Pan QY. .Grain size control and gas sensing properties of ZnO gas sensor[J].Sensors and Actuators, B. Chemical,2000(1/3):277-279.
[5] Y. Natsume;H. Sakata .Zinc oxide films prepared by sol-gel spin-coating[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(1/2):30-36.
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