采用PVD方法在硬质合金基体上制备了不同成分与结构的TiAlN涂层和TiAlSiN涂层.研究了涂层的组织结构和物理性能,分析了Si元素掺杂在TiAlN基涂层中的作用机理及其对涂层性能的影响,并通过切削实验对涂层刀具的使用性能进行了验证.结果表明:在TiAlN基涂层中添加了Si元素获得了明显区别于TiAlN涂层的组织结构,Si元素以Si3N4非晶相形式包覆在TiAlN晶界,一方面起到了细化涂层晶粒尺寸提高涂层硬度的效果,另一方面还可以提高涂层的热稳定性能.切削实验表明,含Si元素的TiAlSiN涂层在许多应用条件下也表现出较TiAlN涂层更优异的使用性能.
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