通过对实验室自主研发的10 kW新型微波等离子体装置基片台的改进,获得了更高的基片温度,更长的保温时间以及更均匀的基片温度.用直径为80 mm的硅片在改进后的基片台上用MPCVD法沉积大面积金刚石膜.在微波功率为5 kW,沉积气压为5.6 kPa环境下基片中心获得900℃的基片温度,沉积时间8h.实验后对硅片中央区域,距离中心20 mm区域,距离基片中心35 mm区域进行对比分析,通过SEM显示三个区域金刚石膜的表面形貌差异很小,通过拉曼光谱观察到在1 332 cm-1处代表金刚石相的特征峰无明显的变化从而确定可金刚石膜在质量上的均匀性,最后对金刚石的厚度表征发现所观察的区域内膜厚变化保持在0.2～0.4 μm之间且金刚石呈现柱状生长模式.
参考文献
| [1] | 谈耀麟.CVD金刚石应用前景探讨[J].超硬材料工程,2009(04):49-53. |
| [2] | Yin Z;Akkerman Z;Yang B X et al.Optical properties and microstructure of CVD diamond films[J].Diamond and Related Materials,1997,6:153-158. |
| [3] | W. Kulisch;C. Popov;E. Lefterova .Electrical properties of ultrananocrystalline diamond/amorphous carbon nanocomposite films[J].Diamond and Related Materials,2010(5/6):449-452. |
| [4] | Ohtake N;Yoshikawa M .Effects of oxygen addition on growth of a diamond film by arc discharge plasma jet chemical vapor deposition[J].Japanese Journal of Applied Physics Part 1:Regular Papers & Short Notes & Review Papers,1993,32(05):2067-2073. |
| [5] | Teraji T.;Mitani S.;Wang CL.;Ito T. .Growth of high-quality homoepitaxial CVD diamond films at high growth rate[J].Journal of Crystal Growth,2002(1/4):287-292. |
| [6] | Liu Y K;Taeng Y;liu C et al.Growth of microcrystalline and nanocrystalline diamond films by microwave plasmas in a gas mixture of 1％methane/5％hydrogen/94％argon[J].Diamond and Related Materials,2004,12:1859-1864. |
| [7] | 熊礼威,汪建华,满卫东,曹菊琴,谢鹏.基片温度对金刚石厚膜生长的影响[J].武汉工程大学学报,2008(01):83-86. |
| [8] | 涂昕,满卫东,游志恒,阳朔.一种提高MPCVD法制备金刚石膜均匀性的方法[J].硬质合金,2014(01):23-29. |
| [9] | Nemanich R J;Glass J T;Lucovsky G .Raman scattering charaterization of carbon bonding in diamond and diamond like thin films[J].Journal of Vacuum Science and Technology,1988,A6(03):1783-1787. |
| [10] | Knigh D S;White W B .Characterization of diamond films by raman spectroscopy[J].Journal of Materials Research,1989,4(02):385-393. |
| [11] | 程光煦.拉曼布里渊散射-原理及应用[M].北京:科学出版社,2001 |
| [12] | 陈辉,汪建华,翁俊,孙祁.微波功率对（100）晶面取向金刚石薄膜制备的影响[J].硬质合金,2013(02):53-58. |
| [13] | 孙祁,汪建华,翁俊,罗曼.MPCVD快速制备（100）面金刚石薄膜[J].硬质合金,2013(01):8-13,18. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%