由于具有抛光速率快、选择性好、自动停止等特点,二氧化铈浆料被广泛用于材料的表面抛光处理,但抛光机理研究的相对滞后严重制约其物化改性和推广.针对这一现状,本文介绍了二氧化铈浆料抛光过程中的物理作用及化学作用,总结了化学机械抛光机理,并对今后研究方向提出了展望.
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