(100)面金刚石的扩散形成

兵器材料科学与工程 , 1999, 22(2): 20-24. doi: 10.3969/j.issn.1004-244X.1999.02.005

(100)面金刚石的扩散形成

邱万奇 ^1, , 刘正义 ^2, , 陈剑惠 ^3, , 周克崧 ^4, , 代明江 ^5, , 王德政 ^6,

1.华南理工大学

2.华南理工大学

3.华南理工大学

4.广州有色金属研究院

5.广州有色金属研究院

6.广州有色金属研究院

基金项目: 广东省自然科学基金(950263)

关键词：热丝 , 金刚石 , 微晶 , 扩散

FORMING(100)FACES OF DIAMOND BY DIFFUSION HEAT TREATMENT

在纯氢气气氛中对用HFCVD法制备的无晶面的微晶金刚石薄膜进行了扩散热处理,结果表明,微晶金刚石在扩散热处理过程中将选择性长大,形成(100)面金刚石,对低压合成金刚石过程中形成(100)面金刚石和扩散热处理中形成的(100)面金刚石的机理作了讨论.

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