利用物理热蒸发法在1 016~1 066℃的温度范围内成功制备出定向排列生长的硅微米晶须.借助扫描电子显微镜(SEM),X射线能谱分析仪(EDX)和透射电子显微镜(TEM)研究了硅微米晶须的形貌、化学成分及晶体结构,讨论了环境压力对硅微米晶须生长有序性的影响.研究结果表明,在环境压力为13.3kPa时,硅微米晶须均垂直于衬底表面生长,定向排列生长的硅微米晶须面积可达13mm×6mm;硅微米晶须的生长遵循气-液-固(VLS)机制;透射电子显微镜观察及选取电子衍射花样表明,硅微米晶须的球形头部为晶体,杆的中部为晶体外包覆非晶体的结合体,杆的尾部为非晶体;环境压力越低,硅微米晶须的定向排列的方向性越好.
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