深紫外(DUV)相干光源对于光刻技术、激光微加工、激光光谱仪等均具有重要的意义.KBe2BO3F2(KBBF)晶体是目前唯一可直接倍频产生深紫外激光的非线性光学晶体.通过数值计算,详细分析KBBF晶体的深紫外输出特性,包括KBBF晶体的折射率、相位匹配角、有效非线性系数、光波走离角、允许参量和转换效率等.结果对于KBBF晶体用于产生深紫外全固态激光(DPL)的实验研究提供重要的理论依据.
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