微弧氧化是一项较新的等离子体化学-电化学成膜技术,硬度和弹性模量是膜的基本微区力学性能.采用交流微弧氧化方法在铝酸盐溶液中在TA2纯钛表面制备出较厚的氧化膜,利用纳米压入法测定了膜的硬度和弹性模量,并探讨了微弧放电对氧化膜相组成和性能的影响.研究结果表明:膜的显微硬度和弹性模量分布有相似的变化规律,从膜表层到膜内部,硬度和弹性模量逐渐增加,并在内层膜达到最大值,分别为9.78 GPa和176 GPa,比钛基体高的多;膜不同深度处TiO1金红石和TiAl2O5相的相对含量变化决定了硬度和弹性模量的分布.
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