采用等离子体基离子注入技术在30CrMnSi钢上制备了TiNx/DLC多层膜,通过X射线光电子谱和激光喇曼光谱测试分析了膜的结构特征,TiNx/DLC膜大气下的摩擦性能在球盘式摩擦磨损试验机上进行.结果表明:DLC膜的结构强烈依赖于基板脉冲偏压,-5kV制得的DLC膜具有较多的C-H键结构,因而硬度最低,仅有8.3GPa;而-15kV的DLC膜由于含有较多的sp3键,获得了最高的显微努氏硬度 (23.6GPa).DLC膜与GCr15钢球大气下的摩擦因数为0.17左右,其磨损性能由于TiNx过渡层引入而显著提高.
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