碳化硅内膜空芯传能光纤的研究

材料科学与工艺, 2003, 11(2): 132-135. doi: 10.3969/j.issn.1005-0299.2003.02.005

碳化硅内膜空芯传能光纤的研究

张琦 ^1, , 侯蓝田 ^2, , 李葵英 ^3, , 周桂耀 ^4,

1.燕山大学,红外光纤与传感研究所,河北,秦皇岛,066004

2.燕山大学,红外光纤与传感研究所,河北,秦皇岛,066004

3.燕山大学,材料科学与工程学院,河北,秦皇岛,066004

4.燕山大学,红外光纤与传感研究所,河北,秦皇岛,066004

基金项目: 国家高技术研究发展计划(863计划)(863-715-01- 0212)

关键词：空芯玻璃波导 , CO2激光 , 红外传能光纤 , SiC薄膜 , CVD

Infrared hollow glass waveguides with SiC film

为了改进空芯传能光纤对10.6μm处CO2激光的传输性能,研制了具有SiC内膜的新型空芯玻璃波导,利用SEM和FTIR等技术分析了反应条件对SiC膜层结构、物相的影响,并测试了光纤的性能.结果表明:温度是影响SiC膜层的重要因素;制得的孔径为950 μm,长为2.5 m的SiC传能光纤理论损耗约为0.7 dB/m,实际传输损耗为0.74 dB/m;SiC的吸收蜂有蓝移现象.

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碳化硅内膜空芯传能光纤的研究

Infrared hollow glass waveguides with SiC film

参考文献