对于交流磁控溅射氧化锌铝陶瓷靶材制备ZAO薄膜,研究了氧流量、基体温度、靶电流密度、铝的掺杂量、本底真空压力和工作气体压力对ZAO薄膜电学性能的影响规律,优化了工艺参数,为工业化生产提供了实验依据.
参考文献
| [1] | Lu YM.;Liu WY.;Yang JS.;Hwang WS. .Effect of RF power on optical and electrical properties of ZnO thin film by magnetron sputtering[J].Materials Chemistry and Physics,2001(2):269-272. |
| [2] | Y. Yoshino;K. Inoue;M. Takeuchi;T. Makino;Y. Katayama;T. Hata .Effect of substrate surface morphology and interface microstructure in ZnO thin films formed on various substrates[J].Vacuum: Technology Applications & Ion Physics: The International Journal & Abstracting Service for Vacuum Science & Technology,2000(2/3):403-410. |
| [3] | FU E G;ZHUANG D M;ZHANG G et al.Effect of technologic parameters on the performances of ZAO thin films deposited by magnetron sputtering[J].Rare Metal Materlals and Engineering,2002,31(zk):523-527. |
| [4] | MINAMIT;NANTO H;SATO H et al.Effect of applied external magnetic field on the relationship between the arrangement of the substrate and the resistivity of aluminum-doped ZnO thin films prepared by rf magnetron sputtering[J].Thin Solid Films,1988,164:275-279. |
| [5] | IGASAKI Y;ISHIKAWA M;SHIMAOKA G .Some properties of Al-doped ZnO transparent conducting films prepared by rf reactive sputtering[J].Applied Surface Science,1988,33:926-933. |
| [6] | HU J;GORDON G .Textured aluminum-doped zinc oxide thin films from atmospheric pressure chemical vapor deposition[J].Journal of Applied Physiology,1992,71(02):880-890. |
| [7] | Ning ZY.;Ge SB.;Chao Y.;Gang ZQ.;Zhang YX.;Liu ZG.;Cheng SH. .PREPARATION AND CHARACTERIZATION OF ZNO-AL FILMS BY PULSED LASER DEPOSITION[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1997(1/2):50-53. |
| [8] | T. Schuler;M. A. Aegerter .Optical, electrical and structural properties of sol gel ZnO:Al coatings[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):125-131. |
| [9] | Fu EG.;Zhuang DM.;Zhang G.;Yang WF.;Zhao M. .Substrate temperature dependence of the properties of ZAO thin films deposited by magnetron sputtering[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2003(1/4):88-94. |
| [10] | IGASAKI Y;SATIO H .Effects of zinc diffusion on the electrical and optical properties of ZnO:Al films prepared by r.f.reactive sputtering[J].Thin Solid Films,1991,199:223-230. |
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