以五水硝酸铟和乙酰丙酮为原料,以无水氯化锡为掺杂剂,采用溶胶凝胶工艺,用提拉法在石英玻璃基体上制备了ITO透明导电薄膜.采用DTA-TG、XRD、sEM等测试手段对薄膜从凝胶态向结晶态转变过程及微区形貌特点进行了表征,并利用四探针电阻率仪考察了热处理温度、提拉速度、冷却速度、提拉次数等工艺条件对薄膜的导电性能的影响.结果表明:ITO干凝胶膜在600℃热处理温度下完全转化为结晶态,ITO薄膜具有由球形粒子堆积而成的多孔结构;热处理温度与冷却速度均会对ITO薄膜的导电率产生重要影响.
参考文献
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