无机纳米杂化聚酰亚胺(PI)薄膜具有优良的耐电晕特性,通过观察击穿孔区形貌研究薄膜击穿机理及纳米颗粒的作用,利用SEM观察阶梯式升压强电场击穿无机纳米杂化PI薄膜孔区形貌,能谱仪测试孔区附近元素分布.研究表明:杂化薄膜严重破坏区域仅局限在孔洞附近10～50 μm范围内,随半径增加,其表面由颗粒大小不均匀、表面粗糙不平,逐渐过渡到颗粒均匀的微观结构状态;Cu含量逐渐减少,Au含量逐渐增加,正常区域电极表面没有损伤;氧化铝纳米颗粒在杂化薄膜中起到阻止电极破坏的作用,薄膜击穿机理属热击穿类型.
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