为评价超薄类金刚石(DLC)膜在使用过程中的安全状况,利用原子力显微镜(AFM)的多模式功能,从磨损、表面改性、力电失效3个方面对DLC膜进行了试验研究.研究结果表明:相同法向力作用在不同厚度薄膜的磨损深度不同;对DLC膜的形貌和电学特性进行比较发现,磨损区域导电性比未磨损区域强;在厚度为64.09 nm薄膜施加正向25 V电场作用下,当针尖作用在表面的压力超过一定临界压力(375 nN)之后, 薄膜发生击穿,形成凹坑.
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