为了推动碳化硅(SiC)光学材料镜面加工研究的发展,介绍了不同种类SiC及其针对性应用,综述了可用于SiC的精加工技术及获得高质量镜片表面的方法,并指出SiC光学材料镜面加工的发展方向.
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