概述了近年来国内外溶胶-凝胶法(Sol-Gel)制备ITO薄膜的研究状况,对Sol-Gel法制备ITO薄膜工艺做了简要介绍,重点讨论了Sol-Gel法制备ITO薄膜的溶胶体系,分析比较了有机醇盐、无机盐以及掺入ITO粉末方法体系的优缺点,最后讨论了甩膜法、提拉法及平铺法在Sol-Gel法制备ITO薄膜中镀膜的应用.指出Sol-Gel法是一种高效可行的制备ITO薄膜的方法,有着广阔的应用前景.
参考文献
| [1] | CHOPRA K L;MAJOR S;PANDYA D K .Transparent conductors:a status review[J].Thin Solid Films,1983,102:1-12. |
| [2] | SUNTOLA T .Atomic layer epitaxy[J].THIN SOLID FILMS,1992,216:84-89. |
| [3] | SHEWCHUN J .The operation of the semiconductorinsulator-semiconductor solar cell:experiment[J].Journal of Applied Physics,1979,50:2832-2834. |
| [4] | Mergel D.;Qiao Z. .Dielectric modelling of optical spectra of thin In2O3 : Sn films[J].Journal of Physics, D. Applied Physics: A Europhysics Journal,2002(8):794-801. |
| [5] | 刘世友 .锡铟氧化物薄膜的生产现状与应用[J].材料科学与工程,1999,66(02):98-100. |
| [6] | FAN J C C .Preparation of Sn-doped In2O3 (ITO) films at low deposition temperature by Ino-beam sputtering[J].Applied Physics Letters,1975,34(08):515-520. |
| [7] | MARUYAMA T;FUKUI K .Indium-tin oxide thin films prepared by chemical vapor deposition[J].Journal of Applied Physics,1991,70(07):3848-3851. |
| [8] | K. Abe;Y. Sanada;T. Morimoto .Anti-Reflective Coatings for CRTs by Sol-Gel Process[J].Journal of Sol-Gel Science and Technology,2001(1/2):151-166. |
| [9] | Suzuki A.;Matsushita T.;Aoki T.;Mori A.;Okuda M. .Highly conducting transparent indium tin oxide films prepared by pulsed laser deposition[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1):23-27. |
| [10] | BENDER M;TURBE J;STOLLENWERK J .Characterization of a RF/Dcmagnetron discharge for the sputtering deposition of transparent and highly conductive ITO films[J].Appl Phys A:Mat Sci Process,1999,69:397-401. |
| [11] | DISLICH H .New routes to multicomponent oxide glasses[J].Angewandte Chemie Int Ed,1971,10(06):363-370. |
| [12] | 游咏,匡加才.溶胶-凝胶法在材料制备中的研究进展[J].高科技纤维与应用,2002(02):12-15,20. |
| [13] | Shigeno E.;Shimizu K.;Seki S.;Ogawa M.;Shida A.;Ide A.;Sawada Y. .Formation of indium-tin-oxide films by dip coating process using indium dipropionate monohydroxide[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1):56-59. |
| [14] | 郭玉忠;王剑华;刘荣佩 等.锡钢氧化物薄膜溶胶-凝胶制备方法[P].CN 1280960A,2001. |
| [15] | 吴世华 .铟锡醇盐的合成及ITO薄膜溶胶-凝胶法制备技术研究[D].昆明理工大学,2001. |
| [16] | MATTOX D M .Sol-Gel derived,air-baked Indium and Tin oxide films[J].THIN SOLID FILMS,1991,204(01):25-32. |
| [17] | HIROAKI IMAI .Ultraviolet-laser-induced crystallization of sol-gel derived indium oxide films[J].J Sol-Gel Sci and Tech,1998,13:991-994. |
| [18] | 张树高;黄伯云;方勋华 .ITO薄膜的半导化机理、用途和制备方法[J].材料导报,1997,11(04):11-14. |
| [19] | Ota R.;Seki S.;Ogawa M.;Nishide T.;Shida A.;Ide M.;Sawada Y. .Fabrication of indium-tin-oxide films by dip coating process using ethanol solution of chlorides and surfactants[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1):42-45. |
| [20] | HADJ TAHAR R B;Ban T;OHYA Y et al.Electric transport in tin-doped indium oxide thin films prepared by sol-gel technique[J].Journal of Applied Physics,1998,83(04):2139-2141. |
| [21] | EPIFANI M;CAPONE S;RELLA R et al.In2O3thin films obtained through a chemical complexation based sol-gel process and their application as sensor devices[J].J Sol-Gel Sci and Tech,2003,26:741-744. |
| [22] | 李金华,陈汉松,李坤,汤国英,陈王丽华.ITO用作铁电薄膜电极的研究[J].功能材料,2001(01):64-66. |
| [23] | SUTAPA ROY RAMANAN .Dip coated ITO thinfilms through sol -gel process using metal salts Ramanan[J].THIN SOLID FILMS,2000,389:207-212. |
| [24] | Alam MJ.;Cameron DC. .Optical and electrical properties of transparent conductive ITO thin films deposited by sol-gel process[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2000(0):455-459. |
| [25] | 王建恩;王运涛;王军 等.三氧化二铟基透明导电薄膜光、电特性的研究[J].功能材料,1995,26(02):141-146. |
| [26] | 王敏,蒙继龙,陈明光.ITO薄膜的光学性能研究[J].中国表面工程,2003(05):27-29,32. |
| [27] | 刘永红,赵高扬,张卫华.溶胶-凝胶法制备的ITO薄膜电学及光学性能的研究[J].功能材料,2004(04):487-488. |
| [28] | MOTOYUKI Toki;Mamoru Aizawa .Sol-gel formation of ITO thin film from a sol including ITO powder[J].J Sol-Gel Sci and Tech,1997,8:717-720. |
| [29] | N.Al-Dahoudi;M.A.Aegerter .Wet Coating Deposition of ITO Coatings on Plastic Substrates[J].Journal of Sol-Gel Science and Technology,2003(1/2/3):693-697. |
| [30] | DISLICH H;HUSSMANNL E .Amorphous and crystalline dip-coatings obtained from organometallic solutions:procedures,chemical processes and products[J].THIN SOLID FILMS,1981,77(02):129-139. |
| [31] | 段学臣;杨向萍 .新材料ITO薄膜的应用和发展[J].稀有金属与硬质合金,1999,138(09):58-60. |
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