采用氢微波等离子体对纳米TiO2薄膜催化剂进行改性处理来改善其光谱响应范围.AFM观察表明未经烧结的TiO2薄膜表面形貌发生较大变化,经过500℃1h热处理过的样品表面形貌变化不大,但处理后样品表面颜色变为淡灰色,并随着气压和功率增大而变深;紫外-可见光谱分析表明,纳米TiO2薄膜催化剂的光谱响应曲线发生了12～25 nm红移;XPS定量分析证实,改性处理后部分TiO2被还原为低价钛氧化物,同时在TiO2薄膜的表面产生了氧空位,从而使样品的吸收边红移,可见光吸收增加.通过不同气压、功率、时间研究显示,在气压/微波功率/时间为16Torr/400W/5min条件下改性效果较理想.
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