研究了MOCVI(Metal Organic Chemical Vapor Infiltration)方法制备Nextel720/SiO2复合材料的工艺理论基础，分析了载气流量、先驱体TEOS(正硅酸乙酯)温度、沉积温度和氧气浓度对氧化硅基体沉积速率和Nextd720/SiO2复合材料显微结构的影响。结果表明，TEOS 60℃，O2流量30ml·min-1，载气流量400ml·min-1，沉积温度600℃为复合材料最佳制备条件。
The development of non-oxide ceramic matrix composite has resulted in composites with suitable property for certain structural application, but they all retain susceptible to long term degradation after high temperature exposure to oxidizing environments. Continuous oxide fibers reinforced oxide matrix composites are attractive for use as high temperature structural materials because they can combine composite properties with long-term oxidative stability. In this paper, the processing of Nextel 720/silica composites by MOCVI (metal organic chemical vapor infiltration) at atrnosphere pressure is described. TEOS (Tetraethylorthosilicate) was used as precursor. The effects of concentration of O2, flux of carrier,temperature of TEOS and deposition temperature on deposition rate of silica and Nextel 720/silica microstructure were studied with lots of experiments. The results exhibit the optimal conditions for MOCVI are TEOS temperature 60℃, deposition temperature 600℃, flow rates of Ar and O2 400 ml· rnin- 1 and 30 ml· min-1 respectively.
参考文献
| [1] | S.M. Johnson;Y.D. Blum;C.H. Kanazawa .Development and Properties of an Oxide Fiber-Oxide Matrix Composite[J].Key engineering materials,1999(164/165):85-90. |
| [2] | Martin Schmucker;Hartmut Schneider;Krishan K.Chawla .Thermal degradation of fiber coatings in mullite-fiber-reinforced mullite composites[J].Journal of the American Ceramic Society,1997(8):2136-2140. |
| [3] | Levi CG.;Dalgleish BJ.;Zok FW.;Evans AG.;Yang JY. .Processing and performance of an all-oxide ceramic composite[J].Journal of the American Ceramic Society,1998(8):2077-2086. |
| [4] | HAANAPPEL V A C;CORBACH H D V;FRANSEN T;et al. .Corrosion resistant coatings(Al2O3 ) proced by metal organic chemical vapor deposition using aluminiun tri-sec-butoxide[J].THIN SOLID FILMS,1993,230:138-144. |
| [5] | 孟广耀.化学气相淀积与无机新材料[M].北京:科学出版社 |
| [6] | 徐永东 .三维碳/碳化硅复合材料的制备与性能[D].西安:西北工业大学,1984. |
| [7] | REES W S.CVD of nonmetals[M].VCH Verlagsge sellschaft mbH,1996 |
| [8] | REES W S.CVD of nonmetals[M].VCH Verlagsge sellschaft mbH,1996 |
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