类似于脉冲激光束烧蚀法制备薄膜,利用纳秒赝火花脉冲电子束与靶材料相互作用,通过靶材料的瞬间熔化、蒸发或以团簇抛出的方式,在低温衬底上重新成核、凝结,得到了与靶材的化学计量比相同的薄膜.讨论了材料烧蚀和沉积过程中出现的诸多现象,并给出高分辨电子显微镜、X射线衍射、光电子能谱分析等方法的测试结果.研究表明,由于赝火花脉冲电子束高功率密度 (109 W/cm2 )的瞬态烧蚀作用,为研究和制备多元素氧化物薄膜、难熔金属多层膜或氧化物/金属多层膜提供了一种新手段.
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