采用有限元计算方法,研究了CVI反应器内部的流场特征.对于形状简单的构件,构件的放置方式和阵列对气体的流动状态具有显著的影响.与横向阵列相比,纵向阵列能充分保证构件沿其长度方向流场均匀性,减小回流现象;在反应器中,随着纵向阵列试样数量的增加和分布均匀性的提高,气体流动速度增大,流场均匀性提高.减少反应器内部的自由空间,是提高流场品质和化学气相沉积效果的关键.基于减少反应器内部的自由空间的原则,针对杯形复杂构件,提出了通过加入与其几何形状相适应的导流板工装,有效避免了在构件内部和外部形成回流区,实现流场的优化设计.
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