描述了氧化铝陶瓷封装制造中热切缺陷的产生,并利用扫描电子显微镜及表面粗糙度测量仪对热切表面的表面质量进行了评价.为了进一步的评价热切缺陷对陶瓷元件可靠性的影响,引入Weibull强度统计理论,比较了自然表面和热切表面的强度差异.实验结果表明,热切表面的表面质量明显差于自然表面;同时热切缺陷存在使氧化铝陶瓷试样强度显著下降,强度分散度增加;试样尺寸减小时,热切缺陷使陶瓷元件可靠性更低.
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