研究了多孔硅冷阴极的场致电子发射特性，实验表明采用电化学阳极腐蚀、氧化、蒸电极等工艺可以制备一种平面薄膜型多孔硅冷阴极。在超高真空环境下测量了多孔硅冷阴极的电子发射特性。
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