用化学气相沉积法制备了液晶光阀中光电导层--非晶硅薄膜,从实验中得出最佳制备工艺的参数取值.给出了用包络线法测量非晶硅薄膜光吸收系数的原理,测量了样品的光吸收系数随波长的变化规律.得到样品在最佳工艺条件下的光吸收系数高于1×103 cm-1.
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