介绍了ITO作为OLED器件阳电极时,ITO各参数对OLED整体性能,如发光亮度、效率、寿命和稳定性的影响,并以溅射ITO工艺为例,分析了制备与处理环境对ITO的方阻、透过率、表面平整度及功函数的影响.针对其成因,提出了一些改进措施.对高性能平板显示OLED器件用透明导电阳极的研制具有一定的参考价值.
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