利用原子力显微镜研究氧等离子体处理对ITO薄膜的微观表面形貌及表面润湿性能的影响.实验结果表明:经过氧等离子体处理,ITO薄膜的平均粗糙度和峰-谷粗糙度减小,薄膜的平整度提高;而且表面吸附力增大近一倍,表面能增大,接触角减小,使ITO薄膜表面的润湿性能和吸附性能得到改善.
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