由于极其优良的热学和光学性能,纳米金刚石薄膜极有可能应用于背投电视的激光光学窗口.文章通过在热丝辅助化学气相沉积法中采用偏压增强成核(BEN-HFCVD),成功地在(100)硅衬底上制得了适于作为光学窗口的高质量的光学级纳米金刚石薄膜,采用的偏压为-30 V.通过表征制备的纳米金刚石薄膜,发现它具有光滑的表面,表面均方根粗糙度(RMS)约为10 nm,并且对自支撑纳米金刚石薄膜进行透射光谱分析得到其透射率达到了50 %.
Owing to its extremely excellent thermal and optical properties, nano-diamond film is expected to be used as the laser optical window in the projection television (PJTV). In this work, high quality nano-crystalline diamond films for optical windows have been successfully prepared on (100) silicon substrates using bias enhanced nucleation hot filament chemical vapor deposition with 30 V negative bias voltage. It is found that the grown nano-diamond films have smooth surface with a root-mean-square surface roughness of ～10 nm, and the transmittance of free-standing nano-diamond film gets up to ～50 %.
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