利用等离子辅助分子束外延技术,在蓝宝石c-平面上外延生长了ZnO单晶薄膜.原位反射式高能电子衍射结果表明,在650℃时样品为平整的表面.但X射线衍射测量表明,在此温度下添加Mg源生长的MgxZn1-xO合金薄膜,随Mg量的增加很快经历了六角相-混合相-立方相的相结构转变,这与扫描电子显微照片的直观结果相对应.分析指出该结果是由生长温度和Ⅱ、Ⅵ族元素的化学剂量比共同决定的.
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