报道了中国科学院离子束开放研究实验室在离子束薄膜合成研究和应用方面的发展和现状。着重介绍离子束辅助沉积薄膜合成、真空磁过滤弧源沉积薄膜生长，以及离子注入 SOI材料合成的方法及其物理过程 ,同时也对离子束合成薄膜在工业及国防上的应用进行了探讨。
Thin film synthesis and applications using ion beam technology at Ion Beam Laboratory,Chinese Academy of Sciences,were reviewed.The results of surface modification of materials prepared by Ion Beam Assisted Deposition (IBAD), Filtered Arc Deposition (FAD) and Silicon－ On－ Insulator (SOI) by ion implantation were reported. The industrial and military applications of ion beam technology were dicussed as well.
参考文献
| [1] | Wang Yi;Liu Xianghuai .NAMCC Report[R].National Advanced Materials Committee of China,1995. |
| [2] | Zou Jiankun;Jiang Binyao;Chen Youshan et al.[J].Nuclear Instruments and Methods in Physics Research,1989,39:182. |
| [3] | Yang Genqing;Jiang Binyao;Zhou Wei .[J].Nuclear Instruments and Methods in Physics Research B:Beam Interaction with Materials and Atoms,1989,37/38:424. |
| [4] | Jiankun Zhou;Fink D;Bersack J P et al.[J].Thin Solid Films,1991,197:381. |
| [5] | Liu Xianghuai;Zhou Jiankun;Zou Shichang et al.[J].Materials Science and Engineering A,1991,139:220. |
| [6] | Daizhi Wang;Xi Wang;Genqing Yang et al.[J].Journal of Applied Physics,1995,77(07):2945. |
| [7] | Yang Genqing;Wang Dazhi;Liu Xianghuai .[J].Surface and Coatings Technology,1994,65/66:214. |
| [8] | 陈酉善;柳襄怀 .[J].上海微电子技术和应用,1996,2:36. |
| [9] | Liu Xianghuai;Zou Shichang;Tu Yushan .[J].Nuclear Instruments and Methods in Physics Research B:Beam Interaction with Materials and Atoms,1987,21:595. |
| [10] | Liu Xianghuai;Zou Shichang;Tu Yushan.[A].,1993:19. |
| [11] | Liu Xianghuai;Zheng Zhihong;Zhou Zuyao et al.[J].Journal of Biomaterials Applications,1996,10(04):330. |
| [12] | Liu X;Zhang F;Wang X.Proc of PRICM- 3[A].Honolulu, Hawaii, USA,1998 |
| [13] | Wang X H;Zhang F;Li C R et al.Invited talk on the Inter Conf on SMMIB'99[J].Surface and Coatings Technology,2000,128:36. |
| [14] | Mao D S;Zhao J;Li W et al.[J].Materials Letters,1999,41:117. |
| [15] | Zhao JP.;Shi TS.;Liu XH.;Wang X. .EVOLUTION OF THE TEXTURE OF TIN FILMS PREPARED BY FILTERED ARC DEPOSITION[J].Journal of Applied Physics,1996(12):9399-9401. |
| [16] | 林成鲁;俞跃辉;方子伟 等.[J].中国科学A辑,1990,8:976. |
| [17] | Jing Chen;Xi Wang;Meng Chen;Zhihong Zheng;Yuehui Yu .Formation of silicon on insulator using separation by implantation of oxygen with water plasma[J].Applied physics letters,2001(1):73-75. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%