介绍了一种具有柱状结构的a-Si:H/nc-Si复合光导层的液晶光阀,复合光导层是通过热蒸发和等离子体辉光放电沉积方法,采用Al诱导a-Si:H制成的.经过测试,这种柱状结构薄膜具有电导各向异性,其横向电导率小于纵向电导率.用这种薄膜制成的液晶光阀其分辨率达到500lp/inch.
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