介绍了垂直沟道器件的常见结构和工艺,分析了垂直沟道器件的最新进展以及垂直沟道器件制作工艺中的最新技术,详细讨论了垂直沟道器件的性能,并分析了垂直沟道器件的优点以及存在的问题.
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