红外热释电探测器的微图形化研究

1.西安交通大学电子材料研究所,西安,710049

2.西安交通大学电子材料研究所,西安,710049;同济大学功能材料研究所,上海,200092

3.同济大学功能材料研究所,上海,200092

4.同济大学功能材料研究所,上海,200092

基金项目: 上海市学科建设项目国家重点基础研究发展计划(973计划)(2002CB613304)

Study on the micropattering of pyroelectric IR sensor

红外热释电探测器的关键是敏感元的研制,而敏感元主要是由具有一定图形的铁电薄膜和上下电极构成.采用半导体光刻工艺,利用化学腐蚀法成功地对PZT铁电薄膜进行了刻蚀,同时采用剥离技术对相应的电极实现了图形化.

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