覆盖热反射层的红外热电堆改进设计

1.中国科学院上海微系统及信息技术研究所,传感技术重点实验室,上海,200050

2.中国科学院上海微系统及信息技术研究所,传感技术重点实验室,上海,200050

3.中国科学院上海微系统及信息技术研究所,传感技术重点实验室,上海,200050

Design of infrared thermopiles with heat reflective emitter coatings

介绍一种封闭薄膜式红外热电堆上增涂金属反射层的新型设计.增涂的反射层通过向环境空间反射和传导冷端吸收的热量来增大传感器的响应率和探测率.同时,这种设计有效地改善了系统的可靠性,并降低了传感器由于环境温度漂移引起的性能参数不稳定,从而增强了整个系统的抗干扰能力.

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