微型夹钳技术是微机电系统研究的重要内容,应用于微装配等领域,在微机电系统的研究及微型产品的研制开发中发挥着重要的作用.本文选取微型夹钳技术最新研究中有代表性的成果进行了回顾,对微型夹钳的结构材料、制作工艺和工作原理等进行了分析,介绍了微型夹钳的最新研究进展,概括了研究特点及发展趋势.
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