以SnCl4·5H2O和NH4F为原料,采用喷雾热分解的方法在片状日用玻璃基材和石英玻璃基材上制得了掺氟氧化锡透明导电薄膜.采用X射线衍射仪(XRD)和扫描电镜(SEM)分别对薄膜的内部结构和表面形貌进行了表征.研究了F-的掺杂量、喷涂温度、沉积时间和热处理对薄膜方阻R□的影响.实验结果表明,当[NH4F]/[SnCl4·5H2O]=32wt%、成膜温度为450℃、喷涂时间为15s时,可使所得薄膜的方阻R□达最低,为10Ω/□.
参考文献
| [1] | 沈岳年,刘文生,刘淑萍,胡瑞生,秦继卫.掺杂SnO2薄膜作为电热材料的研究--成膜工艺条件探讨[J].内蒙古大学学报(自然科学版),2003(01):29-32. |
| [2] | Dewar Joshi J C .Review semiconducting transparent thin films: their properties and applications[J].,1980,51:6243-6251. |
| [3] | 田民波;刘德令.薄膜科学与技术[M].北京:机械工业出版社,1989:597. |
| [4] | Wu NL. .Nanocrystalline oxide supercapacitors[J].Materials Chemistry and Physics,2002(1/3):6-11. |
| [5] | Subramanian V;Gnanasekar K L;Rambabu B .Nano -crystalline SnO2 and In - doped SnO2 as anode materials for lithium batteries[J].Solid State Ionics,2004,175:181-184. |
| [6] | Yude Wang;Xinghui Wu;Yanfeng Li;Zhenlai Zhou .Mesostructured SnO_2 as sensing material for gas sensors[J].Solid-State Electronics,2004(issue 5):627-632. |
| [7] | Ma HL.;Hao XT.;Ma J.;Yang YG.;Huang J.;Zhang DH.;Xu XG. .Thickness dependence of properties of SnO2 : Sb films deposited on flexible substrates[J].Applied Surface Science: A Journal Devoted to the Properties of Interfaces in Relation to the Synthesis and Behaviour of Materials,2002(1/4):313-318. |
| [8] | Wu wen fa;Chiou bi shiou .Properties of radio-frequency magnetron sputtered ITO films without in-situ substrate heating and post-deposition annealing[J].Thin Solid Films,1994,247:201-207. |
| [9] | Lavrencic Stanqar Urska;Orel Boris;Crnjak Orel Zorica et al.Optical and structural properties of SnO2: Sb gels and thin solid films prepared by dip- coating method[A].,1992,1727:166-177. |
| [10] | Putz;J;Ganz D;GASPARRO G, et al.Influence of the heating rate on the microstructure and macroscopic pro -perties of Sol - gel SnO2: Sb coating[J].Journal of Sol-Gel Science and Technology,1998,13:789-792. |
| [11] | Kojima M;Kato H;Imai A et al.Electronic conduction of tin oxide thin films prepared by chemical vapor deposition[J].Journal of Applied Physics,1988,51:902-905. |
| [12] | V. M. Jimenez;J. P. Espinos;A. Caballero;L. Contreras;A. Fernandez;A. Justo;A. R. Gonzalez-Elipe .SnO_2 thin films prepared by ion beam induced CVD: preparation and characterization by X-ray absorption spectroscopy[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1999(12):113-123. |
| [13] | Amanullah FM.;Babu VH.;Pratap KJ. .Compositional analysis and depth profile studies on undoped and doped tin oxide films prepared by spray technique[J].Materials Science & Engineering, B. Solid-State Materials for Advanced Technology,1998(2/3):93-98. |
| [14] | Kojima M;Takahashi F;Kinoshita K et al.Transparent furnace made of heat mirror[J].Thin Solid Films,2001,392:349-254. |
| [15] | Thangaraju B. .Structural and electrical studies on highly conducting spray deposited fluorine and antimony doped SnO2 thin films from SnCl2 precursor[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2002(1/2):71-78. |
| [16] | M.-M. Bagheri-Mohagheghi;M. Shokooh-Saremi .Investigations on the physical properties of the SnO_2-ZnO transparent conducting binary-binary system deposited by spray pyrolysis technique[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2003(1/2):238-242. |
| [17] | Banerjee A N;Kundoo S;Saha P .Synthesis and characterization of nano - crystalline fluorine - doped tin oxide thin films by sol - gel methed[J].Journal of Sol-Gel Science and Technology,2003,28:105-110. |
| [18] | Acosta D R;Estrada W;Castanedo R et al.Structural and surface studies of tin oxide films doped with fluorine[J].THIN SOLID FILMS,1998,375:147-150. |
| [19] | Shanthi E;Dutta V;Banerjee A et al.Electrical and optical properties of undoped and antimony - doped tin oxide films[J].Journal of Applied Physics,1980,51(12):6243-6251. |
| [20] | 赵慧峰,周敖,罗伍文.溶胶-凝胶方法在玻璃表面制备ATO薄膜过程中Na+离子扩散的研究[J].硅酸盐通报,1999(03):40-42. |
上一张
下一张
上一张
下一张
计量
- 下载量()
- 访问量()
文章评分
- 您的评分：
-
10%
-
20%
-
30%
-
40%
-
50%