采用组合靶,利用磁控共溅射技术制备了Co1-xPtx:C复合纳米颗粒薄膜,研究发现CoPt粒子取向和磁性能与CoPt:C薄膜中的Pt浓度有密切关系,在较高Pt浓度的CoPt:C薄膜中观察到垂直各向异性现象.通过改变Pt浓度,可以获得粒子粒径小于10nm、矫顽力可控、高的垂直磁晶各向异性能的薄膜.综合考虑,薄膜的最佳成分为Co47Pt53:C,此时矫顽方达到最大.
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