欢迎登录材料期刊网

材料期刊网

高级检索

采用双离子束溅射法制备了SiOx:C非晶薄膜,在室温下可观察到薄膜样品有强的420nm(紫光)、470nm(蓝绿光)的光致发光(PL).分别对样品在不同温度下退火后,PL测试显示随着退火温度的升高420nm处的峰带逐渐增强变为强的发光峰;470nm处的发光峰位来自于硅基薄膜中富硅引起的中性氧空位缺陷(O3≡Si-Si≡O3),是由与氧原子配位的二价硅的单态-单态之间的跃迁所致;420nm范围的峰带可能来自于薄膜中由C单质、以及Si、O、C三者组成的一个复杂结构.

参考文献

[1] Canham L T .Silicon quantum wire array fabrication by electrochemical and chemical dissolution of wafers[J].Applied Physics Letters,1990,57:1046.
[2] Zhao J.;Lin ZX.;Jiang BY.;Yu YH.;Liu XH.;Wang HZ.;Yang GQ.;Mao DS. .Intense short-wavelength photoluminescence from thermal SiO2 films co-implanted with Si and C ions[J].Applied physics letters,1998(13):1838-1840.
[3] Garrido B;Lopez M;Ferreetal S et al.Visible photoluminescence of SiO2 implanted with carbon and silicon[J].Nuclear Instruments and Methods B,1996,120:101-105.
[4] Gonzalez-Varona;O Garrido B;Perez-Rodriguez A et al.Analysis of the white emission from ion beam synthesized layer by in-depth resolved scanning photoluminescence microscopy[J].Nuclear Instruments and Methods B,2002,91-92:51-54.
[5] Rebohle L;Gebel T;Frob H et al.Ion beam processing for Si/C-rich thermally grown SiO2 layer:photoluminescence and microstructure[J].Applied Surface Science,2001,184:156-160.
[6] Shinji HAYASHI;Masahide KATAOKA;Keiichi YMAMOTO .Photoluminescence Spectra of Carbon Cluster Embedded in SiO2[J].Japanese Journal of Applied Physics,1993,32:274-L276.
[7] Sendovavassileva M.;Dimovamalinovska D.;Marinova T.;Krastev V.;Tzenov N. .VISIBLE LUMINESCENCE FROM C-CONTAINING SILICON OXIDE FILMS[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,1996(1/2):318-322.
[8] Zhengping Fu;Ming Li;Beifang Yang;Ruchuan Liu .Intense ultraviolet photoluminescence from amorphous Si : O : C films prepared by liquid-solution-phase technique[J].Thin Solid Films: An International Journal on the Science and Technology of Thin and Thick Films,2001(1/2):12-15.
[9] Kirk C T .Quantitative analysis of the effect of disorderinduced mode coupling on infrared absorption in silica[J].Physical Review B,1988,38:1255.
[10] 王印月,薛华,郭永平,甘润今,孙燕杰,张亚菲,杨映虎,陈光华.掺碳SiO2薄膜的室温可见光致发光研究[J].半导体学报,1999(02):157-161.
[11] Song HZ.;Li NS.;Wu XL.;Bao XM. .Strong ultraviolet photoluminescence from silicon oxide films prepared by magnetron sputtering[J].Applied physics letters,1998(3):356-358.
[12] J. Zhao;D. S. Mao;Z. X. Lin .Short-wavelength photoluminescence from silicon and nitrogen coimplanted SiO_(2) films[J].Applied physics letters,1999(10):1403-1405.
上一张 下一张
上一张 下一张
计量
  • 下载量()
  • 访问量()
文章评分
  • 您的评分:
  • 1
    0%
  • 2
    0%
  • 3
    0%
  • 4
    0%
  • 5
    0%