AlN薄膜体声波谐振器研究

1.湖北大学,物理学与电子技术学院,武汉,430062

2.湖北大学,物理学与电子技术学院,武汉,430062

3.湖北大学,物理学与电子技术学院,武汉,430062

4.湖北大学,物理学与电子技术学院,武汉,430062

5.湖北大学,物理学与电子技术学院,武汉,430062

基金项目: 湖北省武汉市科技攻关项目

Design of film bulk acoustic wave resonator

采用一维Mason模型,研究了体声波谐振器的频率特性,探讨了压电薄膜AlN和上电极膜厚对谐振频率的影响,压电参数d33及压电薄膜与电极的厚度比率对机电耦合系数的影响,同时研究了谐振区域的面积和声能在衬底中的损耗对品质因数的影响.测量的体声波谐振器频率特性曲线与模拟结果吻合的较好.

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